Fhr Anlagenbau GmbH

Wafer coating, high-performance components,
optoelec­tronic sensors
FHR Anla­gen­bau GmbH offers par­tic­u­larly extens­ive ex­per­tise when it comes to thin films for elec­tron­ics. Our roots are in this mar­ket seg­ment. The com­pany founders began their careers at VEB Elektro­mat in Dresden. They helped to develop and pro­duce vacuum coat­ing sys­tems there. The devel­op­ment of sput­ter­ing tech­no­logy and chem­ical vapour depos­ition is his­tor­ic­ally very tightly inter­woven with the advent of semi­con­ductor tech­no­logy. Thin-film tech­no­lo­gies con­tinue to be essen­tial key tech­no­lo­gies for micro-elec­tron­ics to this day.

This means that future pro­gress in the man­u­fac­ture of semi­con­duct­ors will con­tinue to be inex­tric­ably linked to the fur­ther devel­op­ment of the related coat­ing pro­cesses. For this reason, the atomic layer depos­ition pro­cess (ALD) will gain in import­ance for the con­tin­ued mini­atur­isa­tion out­lined in the SEMI industry asso­ci­ation’s Inter­na­tional Tech­no­logy Roadmap for Semi­con­duct­ors (ITRS).

FHR products for electronic appli­ca­tions
Our cus­tom­ers in research and industry appre­ci­ate cluster sys­tems from FHR. The FHR.Star product series are used by many com­pan­ies and insti­tutes as the stand­ard solu­tion for pro­cessing wafers. This typ­ic­ally involves com­bin­a­tions of coat­ing, etch­ing and heat­ing pro­cesses which, in addi­tion to apply­ing the coat­ing, also allow layer struc­tur­ing as well as layer modi­fic­a­tions. FHR sys­tems and pro­cesses are used for the depos­ition of elec­trical and elec­tronic func­tional lay­ers such as con­tact, mag­netic, piezo­elec­tric lay­ers and dielec­trics, as well as for the pro­duc­tion of elec­tronic switch­ing struc­tures and com­pon­ents such as MEMS, sensors, res­ist­ors, capa­cit­ors, tran­sist­ors and SiC power semi­con­duct­ors.

And with our FHR.Star.500-EOSS® sys­tem, optical fil­ters can be fab­ric­ated dir­ectly on the sensor.

The FHR.Roll product series sup­port our cus­tom­ers in the flex­ible elec­tron­ics seg­ment. For example, our sys­tems are used to pro­duce strip con­duct­ors on poly­mer and metal foils, capa­citor films and flex­ible dis­play films.

In the field of organic elec­tron­ics, com­pan­ies use FHR sys­tems for the vapour depos­ition of organic molecules (monomers) in the pro­duc­tion of organic solar cells, dis­plays and light­ing.