SAMCO Inc.

Semiconductor Equipment
– PECVD, Plasma Etching & Surface Treatment –
for R&D and Production

Product Portfolio
Deposition Icon
Anode PECVD Systems
Cathode PECVD Systems
ALD System
SiC CVD Systems
Etching Icon
RIE Systems
ICP Etch Systems
ICP Etch Systems for SiC Etching
ICP Etch Systems for Batch Processing
DRIE Systems
XeF2 Etch System
Surface Treatment
Plasma Cleaners
(Direct Plasma)
Remote Source Plasma Cleaners
(Downstream Plasma)
UV-Ozone Cleaners