SPS-Europe B.V.

About us
SPS-Europe is a full-service distributor of small equipment, tools and consumables used in semiconductor fabrication, MEMS, & Biotechnology, including wafer Handling&Shipping, Wet Process, Diffusion and Photolitho area. For over 20 years, SPS-Europe offers quality service and products for front-end semiconductor and solar manufacturers and related industries, with six facilities across Europe, and one in Singapore.

We supply a range of Equipment and Consumables including:

WAFER HANDLING:
Manual wafer handling Vacuum Wands, manual Aligners and Transfer systems, wafer Escalators, and a range of LED Inspection Lamps.
Automated wafer handling tools including Aligners, Transfer systems, ID readers, Sorters, and custom engineering.
Robotic wafer automation – including specialist Thin-Wafer handling capabilities.
Wafer Cassettes & Storage Boxes in a full range of SEMI designs and materials. Wafer Shipping containers (Jars, Canisters, Foams Tyvek® etc), and single wafer shipping and storage containers.

WAFERS:
We supply a wide range of II-VI, III-V and specialist substrate materials for Universities and R&D or low volume specialist manufacturing.

WET PROCESSING:
DI Water & Chemical Heating systems, Flow Control & Measurement for all chemicals includingCMP slurry. An extensive range of Process Tanks (PTFE, PP, PVDF, Quartz), chemical Pumps, Valves and Fittings.
Spin Processing systems from small tabletop Spin Coaters to fully integrated Spin-Processing Stations with automated tracking dispense, and custom systems for large formatFPDand specialist applications. We also supply “In-Deck” versions for OEM’s and for integration into existing wet benches.

PHOTOLITHOGRAPHY:
Mask Aligners & UV Light Sources, bench-top small R&D systems, cassette-to-cassette Automated systems, and large formatFPD aligners. We also supply Nano-Imprint modules, as well as a range of UV Meters & Analyzers including meter Calibration services.
We also have a range of high quality Stepper compatible Reticle Cases.

ETCH, CVD & DIFFUSION:
For Diffusion Furnaces we supply Heating elements, Vestibule Blocks, Soft Collar insulation materials, and a full range of Gas Filters.
For Etch, PVD/CVD, & RTP robots, we supply End-Effector wrist upgrades – eliminating end-effector “droop”, and long-lifetime Ceramic Bearing Upgrades for reducing downtime and improving cleanliness.

CMP:
CMPRetaining Rings and Conditioning Disks, Head Motor Refurbishment, as well as OEM-approved upgrades forslurry Flow Control, and other quality upgrades including VME & Pneumatics boards.

BACK-END:
Dicing Film Applicators, UV Curing Systems and Die-Matrix Expanders, as well as consumable Dicing/Grinding Films (standard/UV), Grip Rings, Film-Frames, and their respective Shipping Containers.
Wafer Probe Cleaning Sheets.

Spin coating is a procedure used to apply uniform thin films to flat substrates. In short, an excess amount of a solution is placed on the substrate, which is then rotated at high speed in order to spread the fluid by centrifugal force. A machine used for spin coating is called a spin coater, or simply spinner.

Rotation is continued while the fluid spins off the edges of the substrate, until the desired thickness of the film is achieved. The applied solvent is usually volatile, and simultaneously evaporates. So, the higher the angular speed of spinning, the thinner the film. The thickness of the film also depends on the concentration of the solution and the solvent.

Spin coating is widely used in microfabrication, where it can be used to create thin films with thicknesses below 10 nm. It is used intensively in photolithography, to deposit layers of photoresist about 1 micrometre thick. Photoresist is typically spun at 20 to 80 revolutions per second for 30 to 60 seconds. Owing to the low values of thickness which can be achieved using spin coating methods, this method is often employed in the fabrication of transparent Titanium dioxide thin films on quartz or glass substrates, such thin film coatings may exhibit self cleaning and self sterilizing properties.

Tyvek® is a registered trade mark of E. I. du Pont de Nemours and Company.