WESTPAC, Inc.

AMSystems designs, manufactures and services thin film processing equipment for the coating and ion milling needs of the industry, research labs and universities.

AMSystems equipment ranges from single wafer R&D modules to four chamber production cluster tools. We have over 40 modules installed in R&D and high volume production environments around the world.

Our Piezoelectric Aluminum Nitride system enabled first high volume manufacturing of FBAR filters for cellular phones.

AMSystems provide a complete solution for FBAR/BAW technologies, including thin film deposition along with thickness uniformity trimming.