Fraunhofer-Institut für Photonische Mikrosysteme (IPMS)

The Fraunhofer IPMS is your research and service partner in the field of optical sensors and actuators, ASICs, microsystems (MEMS / MOEMS) as well as nanoelectronics.

As one of currently 72 independent institutions of the Fraunhofer Society for the Advancement of Applied Research eV , Europe’s leading organization for industry-related research, we work together with more than 300 employees on projects for direct benefit to companies and industrial companies, service providers and the public sector for the benefit of society. The Fraunhofer IPMS is part of the Fraunhofer Group for Microelectronics VμE and is involved in numerous regional and international networks of microelectronics and microsystems technology.

In order to meet the high demands of our customers, Fraunhofer IPMS is certified by DEKRA for the research, development and production of photonic microsystems, the corresponding semiconductor and microsystem processes, integrated actuators / sensors and consulting according to the DIN EN 9001: 2015 standard.

Our institute is represented at four locations:

The head office is on Maria-Reiche-Straße 2 in Dresden-Klotzsche. On the premises is a 1500 m² large MOEMS / MEMS clean room (class 4 according to ISO 14644-1), which can be used for technology development up to the pilot production of innovative microsystems up to 200 mm. The range of services includes wafer processing, characterization & testing, assembly and connection technology as well as the organization of external service and supply services.

The Center Nanoelectronic Technologies business unit has its own infrastructure for process and material development on 300 mm wafers at the Königsbrücker Straße 178 branch office within the Infineon Technologies area. For processing customer orders, more than 40 processing and analytical tools are available on 800 m² of cleanroom space (class 6 according to ISO 14644-1) and 650 m² of laboratory space. The equipment includes, among other things, deposition and etching equipment as well as inspection and analysis equipment for determining defects and measuring film properties.

At the Cottbus site, we work in the “Integrated Silicon Systems” part of the institute both on monolithic integrated actuator and sensor systems as well as on terahertz micro modules and applications.