Nikon Precision Europe GmbH

The inline Alignment Station (iAS) and LithoBooster
iAS is a high speed, pre-measurement module that can be integrated between the coater/developer and the NSR-S631E or S635E scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the LithoBooster Standalone Alignment Station.