About us
MUEGGE GmbH is a world leader in industrial microwave and industrial plasma systems. The portfolio includes microwave generators and components as well as plasma systems for a wide range of applications, such as industrial heating and especially plasma technology. The diverse applications of microwave-excited plasmas are semiconductor, flat panel / OLED, MEMS, medical, environmental, and other industrial applications.
The main products include the complete range of microwave components as well as microwave-based plasma applicators. Here, a remote plasma source for use in the semiconductor industry and a plasma array for the coating of almost arbitrary scalable surfaces with high uniformity should be emphasized.
The range of services offered by MUEGGE GmbH ranges from consulting in process engineering through the design of plant systems to their design, installation and commissioning. A comprehensive customer care is the focus.
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