Cleanpart Group GmbH

SURFACE TECHNOLOGY AND MAINTENANCE SERVICES FOR YOUR INDUSTRIAL COMPONENTS
High-precision cleaning, thermal spray and thin-film coatings, analytical services, parts sourcing.

Certified by ASML
Cleanpart was successfully certified by ASML, worldwide leader in the manufacturing of photolithography equipment’s for the semiconductor industry. ASML manufactures machines that are key to the production of integrated circuits (ICs), such as CPUs, MEMS, DRAM memory, flash memory.

ECD – developed by Cleanpart

The latest CVD processes used in the semiconductor manufacturing industry have become extremely sensitive to contamination and parts geometry within the process chambers. After an extensive development program, Cleanpart is now glad to announce that its ECD (enhanced CVD Decontamination) process has been qualified with several leading-edge customers in several regions of the world.