mechatronic systemtechnik gmbh

WE CAN HANDLE IT
thin, wraped and critical wafer handling
unique end effectors and chuck solutions
customized automatisation and integration know how
trusted partner for the semicon industry
Our Mission
Understand:
Understanding the specific characteristics and properties of thin, warped and other critical wafers and the challenges related to handling and automatization of such wafers requires long term specialized know-how and experience in this field.

Innovate:
Challenged by leading semiconductor FABs and semiconductor equipment manufacturers (OEMs), our in-house engineering and software department pushes the limits and are at the forefront of developing new handling components and solutions for our long term technology partners.

Integrate:
As a reliable partner with long term integration (OEMs, SECS/GEM,..) and application know-how, we guarantee a high level of reliability and security through the optimized system performance of our industry proven tools.

Industrialize:
Further standardize and roll out our tools in order to leverage significant scale advantages and meet customers price expectation in mass application markets.

Products
mechatronic systemtechnik has a wide product range with perfectly coordinated individual units so that every customer can achieve the ideal solution to its needs – with-out compromise.

Convince yourself of the professionalism of our Products:

Integrated OEM Tools
Wafer Handling Tool-EFEM (mWL series)
Loading of wafer or frames from cassette/Foup to chuck and returnRead more…

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FOUP Loader (mFL Series)
Loading of dummy wafers to Foup and loading Foup to inspection tool and returnRead more…

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Stand Alone Tools
Wafer Packer (mPT series)
Packing and unpacking of wafers/frames to/from shipping boxes to/from cassettes or FOUPsRead more…

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Wafer Sorter (mWS series)
Sorting, splitting and merging of wafers/frames.Read more…

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TAIKO Ring Remover (mRR series)
Removal of TAIKO ring from frame