E+H Metrology GmbH

Metrology to control your process
Mature – Fast – Precise
The mature design of our Metrology Tools lower maintenance costs and allow extreme uptimes. The metrology focuses tightly your application, waives on unnecessary “bells and whistles” to maximize throughput & reliability and to minimize tool cost. The contactless hybrid sensor technology combines in an appropiate way different worlds of metrology methods to achieve precise and repeatable results.

Standard Metrology Solutions
All standard MX metrology products can be found at the top navigation below products.
Many of these MX modules can be combined on an automated sorter to meet your requirements.

Customized Wafer Metrology Solutions
All products can be customized
according to your requirements.