LIMO GmbH

Beam forming for semiconductor manufacturing technology
Micro-optical solutions have become an indispensable part of complex lighting systems used in high-power semiconductor manufacturing. For many years, leading semiconductor manufacturers have been profiting from the numerous advantages offered by LIMO’s solutions in the field of refractive micro-optics.

By working closely with our customers, we specialize in offering new and innovative options or optimizing existing ones. Thus, LIMO’s micro-optical solutions from the semiconductor industry help to achieve the best possible precision and best resolution in production. With these solutions, LIMO contributed to the optical-lithographic production of structures under 30 nm.

Advantages of the LIMO solutions:

Deep lens structure for large angles (Hyper NA)
High homogeneity (better than 1%)
High efficiency (97%) due to high filling factor and optimized optical surfaces
Compensation of lateral beam offset by homogenizer (beam stabilization)
Permanent quality control
Metallized and soldered optics
Long lifetime
Cleanroom compatible
Complete optical solution with easy handling (chamfered protective edges and mechanical holders) and implementation
Various high quality materials, such as glasses (Quartz, S-TIH53, BK7), crystals (CaF2, MgF2, YAG, LuAG), semiconductors (Si, Ge, ZnSe)
Cutting in any shape
Large spectrum of intensity distribution through free-form surfaces
Various shaped individual lenses within a microlens array enable customized solutions
High rate of reproducibility and repeatability through high precision manufacturing processes and wafer technology

Products & Solutions:

Microlens arrays
homogenizer
Homogenisierermodule
order design
Are you looking for new ways to make your processes even more efficient and profitable? Maybe LIMO has already found your solution. Try our Applications Center! Send us your material samples! Or contact us directly: Send us your requirements via contact form or call us .