VLSI Standards Inc

Calibration Products and Services

VLSI Standards designs and manufactures an extensive array of calibration products and services to assist you with your calibration efforts. Our calibration products and services typically come in the form of calibration standards and references. The primary difference between a calibration standard and a calibration reference is that calibration standards have direct traceability to a higher authority; whereas calibration references do not – often because no official calibration standard exists. Each type of calibration product is made to a rigorous set of internal specifications and serves as an excellent calibration artifact.

With the proliferation of national and international quality calibration standards such as ISO 9000, TS16949, and the APLAC MRA, a company can have a wide spectrum of mandated measurement protocols specifying regular calibrations that require calibration standards that are traceable to a national authority. An effective calibration program will typically use a combination of traceable calibration standards and references, with the traceable reference serving as a daily monitor and the traceable standard used at scheduled intervals or when absolute accuracy is required.

Contamination Calibration Products (Counter and SSIS Calibration)
VLSI Standards’ line of contamination calibration products are used for Counter calibration or Scanning Surface Inspection Systems (SSIS) calibration standards. Contamination calibration products can be used to calibrate an instrument for a particular particle size (with Absolute Contamination Standards) or reticle/pellicle (with Reticle Contamination Standard). Other specially developed contamination calibration products provide recleanable surfaces, scanner diagnostics capability, and a method for calibrating mask and pellicle inspection systems.